飞秒激光微加工技术的评述与展望  

Review and prospects of femtosecond laser micro-processing technology

作　　者：黄佑香[1] 张庆茂[1] 廖健宏[1] 周永恒[1] 

机构地区：[1]华南师范大学激光加工实验室,广东广州510006

出　　处：《金属热处理》2008年第6期8-13,共6页Heat Treatment of Metals

基　　金：广东省科技攻关项目(2006A10405002)

摘　　要：综述了飞秒激光微加工技术国内外的研究现状,介绍了飞秒激光微加工在光学、微电子及生物医学等领域的应用,展望了飞秒激光微加工技术未来发展的趋势以及需要解决的关键技术。The recent progress of femtosecond laser micro-processing was reviewed, and the applications of femtosecond laser micro-processing were introduced in some areas including optics, micro-electronics, biomedicine and so on. Furthermore, the development trends of femtosecond laser micro-processing and some key techniques which demand to be solved were prospected.

关 键 词：飞秒激光 应用 微加工 进展 

分 类 号：TN249[电子电信—物理电子学] TG665[金属学及工艺—金属切削加工及机床]