双晶单色器纳弧度级角度微调装置机构设计  

The mechanical design of nano-radian angular adjustment mechanism in double crystal monochromator

作　　者：陈灏[1] 

机构地区：[1]上海大学精密机械工程系,上海200072

出　　处：《光学仪器》2008年第3期46-50,共5页Optical Instruments

摘　　要：阐述了同步辐射光束线装置的核心部件——双晶单色器角度微调装置的工作原理。应用有限元软件Ansys对机构的应力和变形进行分析。结果表明,有限元分析结果与理论计算基本一致。因此,该角度微调装置能满足大范围调整,纳弧度分辨力的要求。This paper describes the fundamental principle of a important mechanism in synchrotron radiation optical applications-angular adjustment mechanism in double crystal monochromator. We analyze the stress and deformation of this mechanism with Ansys software package. The results from ANSYS are consistent to theoretical expectation. Thus the adjustment mechanism can meet the requirements of large adjustment range and nano-radian resolution.

关 键 词：双晶单色器 柔性铰链 纳弧度 有限元 

分 类 号：TH122[机械工程—机械设计及理论]