高可靠性声体波微波延迟线研究  

Study on Bulk Acoustic Wave Microwave Delay Line with High Reliability

作　　者：马晋毅[1] 江洪敏[1] 汤劲松[1] 赵雪梅[1] 杨靖[1] 

机构地区：[1]四川压电与声光技术研究所,重庆400060

出　　处：《压电与声光》2008年第4期385-386,共2页Piezoelectrics & Acoustooptics

摘　　要：通过优化换能器设计和采用双面光刻、超声键合和密封封装等技术,研制出中心频率f0=4 300 MHz,-3 dB带宽Δf-3 dB≥200 MHz,延迟时间Δt=0.358μs的声体微波延迟线。通过试验验证,该产品具有高可靠性和良好的环境适应性,取得了满意的实用效果。A microwave bulk acoustic wave delay line with centre frequency f0=4 300 MHz, bandwidth △f-3 dB ≥200 MHz, delay time △t：0. 358 μs was developed by optimized transducer design, double sides Photolithography, supersonic wire bonding and fully hermetic package technologies. The device had high reliability and excellent adaptability validated by experimentations with satisfactorily practical effect.

关 键 词：声体波 延迟线 可靠性 

分 类 号：TN65[电子电信—电路与系统]