程控式真空规校准装置  

AN APPARATUS CONTROLLED BY COMPUTER FOR VACUUM GAUGE CALIBRATION

作　　者：李得天[1] 李正海[1] 孟扬[1] 张涤新[1] 温昕晖 李莉[1] 

机构地区：[1]兰州物理研究所

出　　处：《真空与低温》1997年第3期159-165,共7页Vacuum and Cryogenics

摘　　要：程控式真空规校准装置主要用于日常对工作用真空规的校准。它采用动态直接比对法、静态膨胀法和静态直接比对法等三种方法可以对１×１０５～５×１０－４Ｐａ范围内的真空规进行校准。采用可编程控制器对校准全过程实行自动控制，并具有保护、报警、语音提示等功能，提高了工作效率和安全可靠性，避免了由于误操作或真空系统故障造成的经济损失。The apparatus controlled by computer for vacuum gauge calibration is used to calibrate vacuum gauges for routine use from 1×10 5 to 5×10 -4 Pa by the dynamic comparison method, the static expansion method and the static comparison method. It was by a programmalbe controller that the calibration progress was controlled and the working efficiency and reliability improved and the losses caused by wrong operation or malfunction reduced.

关 键 词：真空规 校准 自动控制 真空测量 

分 类 号：TB771[一般工业技术—真空技术]