溅射法合成Al/Pb多层膜的结构与形貌研究  

Microstructure of Al/Pb multi-layer foils made by sputtering

作　　者：李玉阁[1] 孙勇[2] 郭诗玫[1] 

机构地区：[1]昆明理工大学,云南昆明650031 [2]云南省新材料制备与加工重点实验室,云南昆明650093

出　　处：《南方金属》2008年第2期1-3,共3页Southern Metals

基　　金：国家自然科学基金资助项目(21004);云南省自然科学基金资助项目(20020046)

摘　　要：铝铅合金的组织均匀性一直是其应用的瓶颈.本文通过溅射法制备了Al/Pb多层膜合金.经测试及FWHM计算,铝铅颗粒以纳米尺寸存在并分布均匀,实验分析表明,Al峰的消失与多层膜的生长方式有关,合金中存在一定量的非晶.Inhomogeneity in microstructure of Al/Pb alloy has been a bottleneck to its application. The microstructure and homogeneity of Al/Pb multi-layer foil prepared by sputtering was characterized by XRD and SEM. Experimental measurements and FWHM （ ＂full width at half amplitude＂ ） calculation showed that the Al/Pb particles in the layers were nanosizde and uniformly distributed, and the disappearance of the aluminum XRD peaks was associated with the growth mechanism of the multi-player foil. There existed a small quantity of amorphous phase in the foil.

关 键 词：溅射法 Al/Pb合金 纳米 非晶 

分 类 号：TB331[一般工业技术—材料科学与工程] TB383