方型硅杯力敏器件计算机辅助设计  

CAD of Square Silicon Cup Force Sensors

作　　者：张治国[1] 匡石[1] 

机构地区：[1]沈阳仪器仪表工艺研究所

出　　处：《仪表技术与传感器》1997年第8期15-18,共4页Instrument Technique and Sensor

摘　　要：介绍了扩散硅力敏器件计算机辅助设计的方法。根据方型硅杯形式的有限元分析结果，计算力敏器件的性能。给出了方型硅杯形式的应力和热应力分布曲线以及力敏电阻灵敏度曲线。A CAD method for diffusion silicon force sensor is introduced.According to the finite element analysis result for the square silicon cup,the performances of the force sensors have been calculated.This paper also presents the stress and heat stress distribution curves of the square silicon cup as well as the sensitivity curves of force sensors, which provides the theoretical basis for designing sensors and planar process patterns.

关 键 词：有限元 力敏电阻 CAD 传感器 力敏器件 

分 类 号：TP391.72[自动化与计算机技术—计算机应用技术] TH823.032[自动化与计算机技术—计算机科学与技术]