毫米波悬臂梁串联反射型接触式RF-MEMS开关的研究  

Research on Millimeter Wave DC-Contact Cantilever RF MEMS Reflection Series Switches

作　　者：戴永胜[1] 方大纲[1] 张宇峰[1] 祁高品[1] 朱健[2] 郁原卫[2] 

机构地区：[1]南京理工大学,南京210094 [2]南京电子器件研究所,南京210016

出　　处：《微波学报》2008年第3期74-77,共4页Journal of Microwaves

基　　金：国防重点实验室基金(51491030205BQ0201)

摘　　要：介绍了毫米波悬臂梁接触式反射型RF-MEMS串联开关芯片的设计、制造和测试。采用三维电磁场仿真软件AnsoftHFSS进行仿真和优化设计,开关芯片尺寸为:0.8mm×0.95mm×0.4mm,芯片测试结果为:在50GHz频率插入损耗为1.1dB,隔离度测试值约为23dB,设计和测试的结果吻合较好。这种RF-MEMS开关可在毫米波系统中广泛应用。Design, fabrication and test results of millimeter wave DC-contact cantilever RF MEMS reflection series switch chips axe presented. The MEMS switch is simulated and optimized using Ansoft HFSS softwaxd. The size of chips of the MEMS switches is 0.8mm × 0.95mm × 0.4mm. The test results show the good performance of the device. At 50GHz frequency, insertion loss of the device is 1. 1 dB, isolation of the device is about 23dB. The reasonable agreement between design and measurement is observed. The RF-MEMS suitches are used in millimeter wave system widely.

关 键 词：共面波导 毫米波开关 插入损耗 隔离 驱动电压 

分 类 号：TM564[电气工程—电器]