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作 者:陈长琦[1] 张建国[1] 王君[1] 郭江涛[1]
机构地区:[1]合肥工业大学机械与汽车工程学院真空技术与应用工程中心,安徽合肥230009
出 处:《真空》2008年第4期83-86,共4页Vacuum
摘 要:论述了考夫曼离子源中两种磁场结构的特点。在采用多极磁场的离子源中,由于放电室内低磁场区的存在,可获得均匀性好的离子束流。采用环形永久磁体改进设计了考夫曼离子源的多极磁场,简化了磁路结构。运用Ansoft软件对多极磁场进行了数值模拟,结果分析表明设计是可行的,为该类型离子源的磁路优化设计提供了理论依据。There are two types of magnetic fields for Kaufman ion source, and their structures are discussed. In the multipole magnetic field, the highly homogeneous ion beam current can be gained because it is in the area of low-intensity magnetic field in discharge chamber. The other type is the structually improved multipole magnetic field of which the ring permanent magnets are introduced to simplify the magnetic circuit. Then, the magnetic field distribution of ring magnets is simulated by the software Ansoft. The analysis of the simulation results indicated that the structually improved design is feasible, which provide a theoretical guidance to improve the design of magnetic circuit for Kaufman ion source.
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