Parylene薄膜及其在MEMS中的应用  

Parylene Film and Its Applications in MEMS

作　　者：王亚军[1] 刘景全[1] 杨春生[1] 沈修成[1] 郭忠元[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200030

出　　处：《微纳电子技术》2008年第7期403-410,415,共9页Micronanoelectronic Technology

基　　金：微米/纳米加工技术国家级重点实验室基金(9140C7903020806);校国防科技发展基金资助项目(07GFH-GB01-030)

摘　　要：介绍了聚合物Parylene,包括其制备工艺和Parylene薄膜的图形化。着重介绍了Parylene在微流体系统的应用,包括微阀、微泵和微通道;在可植入微系统中的应用,包括人工耳蜗和视网膜假体。近来的研究表明,基于Parylene的MEMS微器件广泛应用在各种MEMS微结构、微传感器和微驱动器上,Parylene在各种完全集成微系统应用中将具有更加诱人的前景。Parylene preparation process in Parylene deposition and patterning and its applications in microfluidic system, such as microvalve, micropump and microchannel, are introduced. Furthermore, the progress of Parylene based implantable biotechnology microsystem, such as artificial cochlear and retinal prosthesis, are discussed. Recent researches show that Parylene MEMS has wide applications in MEMS microstructures, microsensors and microactuators. It is believed that Parylene has a bright future in fully integrated microsystem applications.

关 键 词：聚对二甲苯 微阀 微泵 微通道 人工耳蜗 视网膜假体 微机电系统 

分 类 号：TM211[一般工业技术—材料科学与工程] TH703[电气工程—电工理论与新技术]