椭偏法测量表面微粗糙合金钢材料的光学常数研究  

Optical constant measurement of rough surface alloy steel by ellipsometry

作　　者：武颖丽[1] 吴振森[1] 

机构地区：[1]西安电子科技大学理学院,陕西西安710071

出　　处：《应用光学》2008年第4期610-613,共4页Journal of Applied Optics

基　　金：国家自然科学基金项目(JJ0500070706)

摘　　要：采用椭偏法测量入射光波长为0．632μm，入射角为50°～85°时合金钢的光学常数。考虑材料表面的粗糙度，用Ohlidal—Lukes理论对所测光学常数值进行了修正，发现椭偏参量的修正量随入射角增大而增大。结果表明，测量入射角在50°～70°范围内测量值与修正后计算结果基本一致，在70°～85°范围内测量值与修正后的计算结果差距较大。因此，用椭偏法测量合金钢光学常数时使入射角小于70°，测量结果会更加准确。The optical constant of alloy steel was measured with ellipsometry when the incidence wavelength was 0. 632 μm and incidence angle was 50°-80°. Since the surface of the alloy steel was rough, the measured optical constant was corrected with the Ohlidal-Lukes theory. It is founded that the correction of the ellipsometric parameter increases proportional to the incidence angle. The results indicate that the calculated result after correction agrees with the measured one when the incidence angle is in the range of 50°- 70°, but differs significantly when the incidence angle is in the range of 70°-85°. Therefore, the accurate optical constant of alloy steel can be obtained by ellipsometry when the incidence angle is less than 70°.

关 键 词：椭偏法 光学常数 材料表面粗糙度 

分 类 号：TN206[电子电信—物理电子学]