简化流程的多晶硅像素电极透反LCD基板的研究  

Poly-Si LCD pixel electrode and transflection AMLCD panel made with simplified process flow

作　　者：李阳 孟志国[1] 吴春亚[1] 王文[2] 郭海成[2] 

机构地区：[1]南开大学光电子所,天津市光电子薄膜器件与技术重点实验室,天津300071 [2]香港科技大学电机与电子工程系,中国香港 [3]不详

出　　处：《光电子．激光》2008年第7期872-876,共5页Journal of Optoelectronics·Laser

基　　金：国家高技术研究发展计划“863”平板显示专项资助项目(2004AA303570);国家自然科学基金重点基金资助项目(60437030)

摘　　要：鉴于MIC P+-Poly-Si薄膜具有比较好的电学特性和近似半透半反的光学特性,本文提出一种以此用作透反双重功能LCD下电极的LCD基板的设计考虑。并针对MIC多晶硅薄膜在红、绿和蓝三色区的透射率与反射率的差异,采用不同面积的铝反射片巧妙地予以平衡和补偿。校正结果表明在可见光范围内,其红光、绿光和蓝光处的透射率和反射率基本符合白光平衡的要求。用该薄膜多晶硅作LCD像素电极技术制备的AMLCD中,其像素电极既是驱动TFT的漏极的延伸,而铝反射镜又是与TFT的电极连线同层制备。这样,不仅可以制备出性能良好透、反双功能的LCD基板,而且明显简化了AMLCD制备工艺流程。工艺流程的简化将有利降低制造成本。Since P＋-MIC Poly-Si thin film has good electricity characteristics and the optic characteristic of semi-transparent and semi-reflective,it is used as the LCD electrode which is both transparent and reflective to form a transflection LCD panel.However,the MIC poly-Si thin film′s transmission and reflection varies in the spectrum of visible light,which results in the ＂aberrance＂ of the white light.Therefore,we put high reflective Al of different area on the electrode to compensate and keep a balance among the three essential colors light transmitting and reflecting from the MIC p-Si electrode.The result indicates that in the spectrum of visible light,the reflection and transmission of red,green and blue light are basically accordant.With the MIC Poly-Si LCD anode technique,the LCD anode is the prolongation of its driving TFT drain,and the Al reflective mirror is prepared with the same Al electrode wire of TFT.Therefore,the high performance transflection LCD would be achieved and the preparation process flow of AMLCD panel would be simplified.Based on the MIC poly-Si transflection electrode technique and the full PMOS poly-Si peripheral driving circuit technology,a 4-MASK process flow is proposed and it is carried on the system-on-panel active matrix substrate for LCD（SOP-AMLCD）.The simplification of the process flow would result in the significant reduction of manufacturing costs.

关 键 词：LCD 多晶硅薄膜电极 光谱校正 透反LCD 简化流程 

分 类 号：TN141.9[电子电信—物理电子学]