基于实时监测的激光外差干涉仪闲区误差自动补偿  

Automatic real-time compensation of vacant band error based on monitor the laser heterodyne interferometry timely

作　　者：杨宏兴[1] 谭久彬[1] 胡鹏程[1] 付海金[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,哈尔滨150080

出　　处：《光电子．激光》2008年第7期934-937,共4页Journal of Optoelectronics·Laser

基　　金：黑龙江省科技攻关资助项目(GC04A515)

摘　　要：针对目前激光外差干涉实时测量中,由于现场工作环境的限制,无法对闲区误差进行实时自动补偿的问题,提出了一种基于实时测量闲区值和折射率值的闲区误差补偿方法。该补偿方法以激光测距仪为主体,结合偏振片、偏振旋转器对闲区长度值进行测量,利用空气折射率测量仪获得测量过程中的空气折射率数值,并根据终端修正原则,取每次测量开始和结束时的折射率数值与清零时的闲区值对干涉测量结果进行修正。可有效降低实时测量中由折射率变化所引起的闲区误差对测量结果的影响,实验表明,本方法在折射率变化2.7×10-6,闲区值为100 mm的情况下,对HP5528干涉系统进行补偿后使零点漂移最大值从300 nm减小到30 nm。In order to compensate the vacant band error automatically and timely in the real-time measurement,a method based on measuring the value of the refractive index and length of the vacant band timely is proposed.The method uses the laser ranger,polarization film and polarization rotator to buildup the metrical apparatus and measure the length value of vacant band,uses the refractive index metrical apparatus to get the value of the refractive index,then according to the ＂end correction method＂ the vacant band error can be compensated.The experiment result shows that the system can reduce the zero deviation from 300 nm to 30 nm based on the HP5528 heterodyne interferometry system,when the refractive index floats 2.7×10^-6 and the length of the vacant band is 100 mm.

关 键 词：闲区误差 自动实时补偿 外差干涉 折射率 

分 类 号：TN247[电子电信—物理电子学]