氮气流量对金刚石膜生长的影响  

Influence of the nitrogen concentration on the growth of large area diamond film

作　　者：赵利军[1] 毕冬梅[2] 

机构地区：[1]长春大学 人事处,吉林长春130022 [2]长春大学 理学院,吉林长春130022

出　　处：《长春大学学报》2008年第6期29-31,共3页Journal of Changchun University

基　　金：863项目(2002AA325090)

摘　　要：采用电子辅助热灯丝化学气相沉积(EA-CVD)方法沉积大面积金刚石膜,在金刚石膜的沉积过程中,氮气流量对金刚石膜沉积的影响会直接影响着金刚石膜的生长和质量。用Raman等手段对金刚石膜的生长特性进行了表征。Large area diamond films were deposited by EA-CVD method. During deposition, the growth and quality of diamond films were influenced by the change of the nitrogen concentration. The growth property of diamond film was characterized using Raman spectram.

关 键 词：金刚石膜 氮气流量 膜的质量 

分 类 号：O484[理学—固体物理]