聚焦离子束系统液态金属离子源的研制  

Newly Developed Liquid Metal Ion Source for Focused Ion Beam Generation

作　　者：马向国[1] 刘同娟[1] 顾文琪[2] 

机构地区：[1]北京物资学院,北京101149 [2]中国科学院电工研究所,北京100080

出　　处：《真空科学与技术学报》2008年第4期331-336,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：设计了一种聚焦离子束系统用液态金属离子源(Liquid Metal lon Source-LMIS),本文对该源组件结构的设计、发射针尖的腐蚀工艺、挂金属镓工艺、测试系统的设计作了介绍;然后对该离子源的I-V特性、角电流密度、稳定性以及寿命等性能进行了测试。实验结果表明,该源的各项指标均达到了聚焦离子束系统的要求,并对影响源性能的因素进行了分析,从而为合理有效地设计液态金属离子源提供启示。A novel type of liquid metal ion source（ LMIS） has been successfully developed for the focused ion beam. Technological discussions focused on its structural design, the electrochemical etching of the tungsten tips, gallium wetting of the tip and the measurement setup of its field ion emission characteristics.The current-voltage（I-V） characteristics, angular ion current density distributions, its stability and its lifetime, were experimentally evaluated. The influence of various factors on emission properties of the LMIS was tentatively analyzed to further improve its design. The results show that the newly-developed LMIS meets all the stringent requirements of the focused ion beam system.

关 键 词：聚焦离子束 液态金属离子源 测试系统 发射特性 

分 类 号：TN405[电子电信—微电子学与固体电子学]