基于超纯水电化学加工的扫描直写技术  

Scan Direct Writing Technology of ECM in Ultrapure Water

作　　者：鲍怀谦[1] 徐家文[2] 

机构地区：[1]山东科技大学机械电子工程学院,青岛266510 [2]南京航空航天大学机电工程学院,南京210016

出　　处：《纳米技术与精密工程》2008年第4期312-315,共4页Nanotechnology and Precision Engineering

基　　金：航空科学基金资助项目(02H52049)

摘　　要：为了充分发挥电化学加工以离子状态去除材料的加工机理,实现其在微细、精密,甚至是纳米加工领域中的应用,针对绿色制造和微细加工的需求,提出以超纯水为电解液的微细电化学加工方法.采用阳离子交换膜促进超纯水解离,提高电化学加工过程中电流密度;利用微探针作为工具电极,通过数控机床控制运动轨迹保持与阳极表面的间距恒定,以不同路径横向扫描工件,即可在工件阳极表面加工出2D/3D几何结构.并通过试验加工字母"PW-ECM",验证了超纯水作为电解液进行电化学扫描直写加工技术的可行性.In order to adequately utilize the machining mechanism of electrochemical machining （ECM）in the micro- machining, precision finishing, and even nano-fabrication, which can remove one atom by one atom from the surface of the workpiece, the ECM in ultrapure water was presented aiming at the green manufacturing and microfabrication. Water disso- ciation was accelerated under the function of cation exchange membrane to increase the current density in ECM process. It was validated that ECM in ultrapure water was applied to 2D/3D shape machining in the anode surface of workpiece with a microprobe controlled by NC machine tool to keep a constant distance from anode surfaces with different horizontal scanning paths.As a result of technological test, letters ＂PW-ECM＂ were machined,which confirms that the ECM scan direct writing technology is feasible by taken ultrapure water as electrolyte.

关 键 词：电化学加工 超纯水 阳离子交换膜 水解离 

分 类 号：TG662[金属学及工艺—金属切削加工及机床]