电弧离子镀TiN薄膜的往复滑动摩擦学行为研究  

A Study of Reciprocating Sliding Tribological Properties of TiN Film Prepared by Multi-arc Ion Plating

作　　者：张碧云[1] 聂朝胤[1] 谢红梅[1] 杨娟[1] 

机构地区：[1]西南大学材料科学与工程学院,重庆400715

出　　处：《材料导报》2008年第7期126-129,共4页Materials Reports

基　　金：重庆市自然科学基金资助项目(2006BB4050);西南大学科技基金资助项目(SWNUF2005001;SWNUB2005001)

摘　　要：采用电弧离子镀技术在不锈钢基片上沉积了TiN薄膜,利用显微硬度计测量了薄膜的表面硬度。采用球-盘式摩擦磨损实验机对比研究了基片和薄膜在与GCr15配副的情况下,二者在空气中干磨擦状态下的摩擦磨损性能;利用扫描电镜(SEM)、能量衍射谱仪(EDS)和表面粗糙度台阶轮廓仪对薄膜的磨损区域进行了微观分析。实验结果表明,随着法向载荷和往复速率的增大,薄膜和基体的摩擦系数都减小,但薄膜的摩擦系数始终小于基体的摩擦系数。不锈钢基体与GCr15配副时,基体磨损较大,此时的磨损机制是犁削磨损和磨料磨损;而TiN薄膜与GCr15配副时,薄膜不仅无磨损,而且其表面将形成一层具有润滑作用的移着膜,此时的磨损机制主要是磨料磨损,因此在不锈钢基体上沉积TiN薄膜有利于提高基体的耐磨性。TiN film is prepared by using multi-arc ion plating technique on the stainless steel substrate. The microhardness is measured by the Hv sclerometer. The wear resistance of TiN film and the substrate is studied by the ball-on-disk tribometer in the air, and the microcosmic analyses about the wear areas are obtained by scanning electron microscope,energy dispersive spectrum,and surface figure apparatus. The analysis results show that the friction coefficients of the film and the substrate decrease with the increase of normal loads and reciprocating velocities, but the film has a lower coefficient than the substrate. The stainless steel substrate is worn seriously when matching with the GCr15. The wear mechanism is ploughing and polishing mostly. But the TiN film has no wear when it matches with the GCr15. It is almost that the counterpart is worn and then it transfers to the surface of the film. The wear mechanism is polishing. Therefore it can improve the wear properties of the substrate greatly by depositing a layer of TiN film.

关 键 词：电弧离子镀 氮化钛薄膜 对偶件 摩擦系数 摩擦学性能 

分 类 号：TG174.444[金属学及工艺—金属表面处理] TB43[金属学及工艺—金属学]