风云一号气象卫星用三元线列硅探测器  

THREE-ELEMENT LINEAR SI DETECTOR FGR FY-1 METEOROLOGICAL SATELLITE

作　　者：梁平治[1] 张忠堂[1] 孙德庆 谈德明[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《红外研究》1990年第2期115-122,共8页

摘　　要：根据对器件响应率光谱分布、暗电流、结电容的要求,确定了硅材料参数和有关工艺参数。讨论了为提高器件可靠性及防止光串音,在器件结构设计上采用的光敏元圆角化、加保护铝环和铝屏蔽、浓磷扩散等措施。研制的器件响应率在632.8nm时为0.3A/W,在-10V,25℃时暗电流为5×10^(-11)A,结电容为29pF。器件通过了严格的老化筛选和各种环模试验,因而能适应于空间环境的使用要求。According to the requirements on responsivity spectrum, dark current and junction capacitance, Si material parameters and processing parameters for the detector have been determined. The layout and processing design of detectors, Al guard ring, Al light shield layer and heavy doping of P for improvement of reliabilily and light crosstalk are discussed. The responsiviy of the developed detector is 0.3 A/W at 632.8nm, dark cnrrent and capacitance are 5×10^(-11) A and 29 pF at-10V, 25℃, respectively. They excellently satisfy the requirements of the scanning radiometer.

关 键 词：气象 卫星 探测器 硅探测器 

分 类 号：V474.24[航空宇航科学与技术—飞行器设计]