溶胶-凝胶法制备Mg_xZn_(1-x)O薄膜的结构及光学特性  

Structural and Optical Properties of Mg_xZn_(1-x)O Thin Films Prepared by Sol-gel Method

作　　者：刘莹[1] 阳生红[1] 张曰理[1] 包定华[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室物理科学与工程技术学院,广东广州510275

出　　处：《发光学报》2008年第4期718-722,共5页Chinese Journal of Luminescence

基　　金：广东省自然科学基金(5003289);教育部博士点基金(20060558068)资助项目

摘　　要：用溶胶-凝胶法制备了一系列的MgxZn1-xO(0≤x≤0.3)薄膜,并用X射线衍射(XRD)和光致发光(PL)研究了不同的退火温度和Mg的掺杂含量对MgxZn1-xO薄膜的结构和光学性质的影响。研究表明:MgxZn1-xO薄膜为单相六角纤锌矿结构,并且具有沿c轴的择优取向;发现了中间热处理温度为350℃的MgxZn1-xO薄膜退火温度的转折点为700℃,低于这个温度时随退火温度的升高,(002)衍射峰强度增强且掺Mg的薄膜既有紫外光又有绿光发射;800℃退火时,薄膜的(002)衍射峰强度减小,出现了(100)和(101)衍射峰,且掺Mg的薄膜只有紫外发光峰。不同的掺杂浓度对于发光也有影响,低于700℃退火时,ZnO薄膜只出现紫外发光峰,掺Mg的薄膜却出现了紫外和绿光两个发光峰。A series of MgxZn1-x O （0 ≤ x ≤0.3 ）thin films were successfully fabricated by sol-gel method. The structural and optical properties were studied using, XRD and photoluminescence spectrum. The results indicate that the MgxZn1-xO thin films have hexagonal wurtzite single phase structure and a preferred orientation with the c axis perpendicular to the substrate. It was observed that there is an critical annealing temperature （700 E ） of the MgxZn1 -xO （0.1 ≤x≤0.3） th;.n films preheating at 350 ℃, when annealing below this temperature, the intensity of （002） XRD peak increased, and the PL spectra of MgxZn1-xO （0.1≤x ≤0.3 ）thin fihns show both UV emission and green emission; when annealing above this temperature, the intensity of （002） peak decreased while （100） and （101） peak appeared, and the PL spectra of MgxZn1-xO（0.1≤x≤0.3）thin films show only UV emission. The impurity concentration also affect the emission, when annealing below 700 ℃, the PL spectra of pure ZnO thin films show only UV emission, while the PL spectra of the ;MgxZn1-x O （0.1 ≤ x ≤0.3 ） thin films show both UV emission and green emission.

关 键 词：MgxZn1-xO薄膜 溶胶-凝胶法 XRD 光致发光 

分 类 号：O472.3[理学—半导体物理] O482.31[理学—物理]