计量型原子力测头用于纳米台阶高度样板的测量  

Measurement of Nano-step Height Scales with a Metrological AFM Head

作　　者：卢明臻[1] 高思田[2] 杜华[2] 崔建军[2] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084 [2]中国计量科学研究院,北京100013

出　　处：《计量学报》2008年第3期193-197,共5页Acta Metrologica Sinica

基　　金：国家科技攻关计划“重要技术标准研究专项”(2002BA906A26)

摘　　要：为"大范围纳米结构测量系统"研制的计量型原子力测头,采用光束偏转法检测探针悬臂偏转。原子力测头的布置在X、Y方向无阿贝误差。在50 mm×50 mm×2 mm的测量全程内,测头与样品的相对位移可以由激光干涉仪直接读数,因此可溯源到米定义国家基准。激光波长由Elden公式计算修正。使用德国物理技术研究院(PTB)提供的台阶高度样板一套,所得测量结果与PTB测量结果进行比对,结论为:测量系统的测量重复性不大于0.82 nm;比对系数En≤1,验证了测量结果是准确的,测量不确定度评定是合理、可信的。A metrological atomic force microscope （AFM） head developed for ＂the large-scale nanostructure measuring system＂ is presented and an optical beam deflection method is adopted in its design. The AFM head is mounted without Abbe error in the X and Y directions. Relative displacement of the AFM head and the specimen is measured by interferometers with the working range of 50 mm ×50 mm × 2 mm so that results are traceable. The value of laser wavelength is corrected by the Elden formula. The measurement of the step height scales offered by Physikalisch-Technische Bundesanstah （PTB） is performed and results can be compared to that got from PTB. The conclusion is that, firstly, repeatability of the instrument is no more than 0.82 nm, and secondly, comparing factor En ≤ 1, which means that results are correct and the evaluation of uncertainty of measurement is reasonable and convincible.

关 键 词：计量学 原子力显微镜 台阶高度样板 阿贝误差 激光干涉仪 溯源 

分 类 号：TB921[一般工业技术—计量学]