溅射沉积ZnO/FC多功能有机-无机杂化膜  

Sputtering and Deposited Hybrid Organic-Inorganic ZnO/FC Multi-Function Films

作　　者：张浴晖[1] 齐宏进[2] 谭金山[1] 

机构地区：[1]青岛大学化学化工学院 [2]五邑大学纺织服装系,广东江门529020

出　　处：《高分子材料科学与工程》2008年第8期151-154,共4页Polymer Materials Science & Engineering

基　　金：青岛大学青年科研基金资助

摘　　要：详述了ZnO/FC杂化膜的制备方法和基本性质。该杂化膜采用射频磁控溅射法通过二次溅射在聚对苯二甲酸乙二醇酯(PET)基底上沉积而成。所得杂化膜的性质强烈地依赖于制备条件。用AFM、UV、XPS以及静态水接触角表征了杂化膜的形貌、结构和特性。杂化膜的表面起伏不平。静态水接触角大于90°,表现出较好的疏水性,随着放电功率的增大,杂化膜的接触角逐渐增大,压力增加,接触角逐渐减小。杂化膜具有较好的紫外线吸收性能,显示出对紫外光的多重吸收-散射作用。是一种既具有疏水性又具有抗紫外线辐射的多功能有机-无机杂化膜。Preparation procedure and properties of hybrid ZnO/fluorocarbon films were described and discussed. The hybrid films have been deposited by radio frequency （RF） sputtering using polytetrafluoroethylene （PTFE） and Zn target on polyethylene terephthalate （PET） substrate. Argon was used as the working gas and oxygen as reacting gas. The films obtained reveal a wide range of properties which depend on the preparation conditions. Morphology and composition of the hybrid films have been analyzed by means of Atom Force Microscopy （AFM）, UV-visible spectrophotometer, X-ray photoelectron spectroscopy （XPS） and static contact angle measurements. The surface of the hybrid films is not flat. The static contact angle of water is larger than 90° and increases with the power increasing and the pressure decreasing. The hybrid films exhibit excellent and multi-enhanced ultraviolet absorption function. It is a multi-function organic-inorganic hybrid film.

关 键 词：磁控溅射法 杂化材料 氟碳 氧化锌 

分 类 号：TB383[一般工业技术—材料科学与工程]