在蓝宝石光纤端面上生长ZnO薄膜的方法及光学性能分析  

Growth and optical performance of ZnO films on sapphire fiber ends

作　　者：周红[1] 隋成华[1] 陈乃波[1] 许晓军[1] 魏高尧[1] 蔡萍根[1] 

机构地区：[1]浙江工业大学应用物理系,杭州310032

出　　处：《功能材料与器件学报》2008年第4期729-734,共6页Journal of Functional Materials and Devices

基　　金：国家自然科学基金资助项目(No.60777034);浙江省教育厅资助项目(No.20051437)

摘　　要：介绍了利用电子束蒸发技术在蓝宝石光纤端面上生长具有良好的表面形貌和晶体结构的ZnO晶体薄膜的方法，并构建了一套具有较低插入损耗的光纤检测系统用于光学性能分析。透射光谱测试结果显示，蒸镀在蓝宝石光纤端面上的ZnO薄膜具有陡峭的光学吸收边，且经历400℃高温退火后，除可见光波段（400～450nm）透射率有一定的减小外，其在紫外波段（300～380nm）的光学吸收边仍基本重合，表明在光纤端面上的ZnO晶体薄膜具有较好的温度稳定性，这为今后进一步利用ZnO薄膜光学吸收边随温度变化而移动的特性，研制以ZnO镀膜为敏感材料的新型光纤温度传感器打下良好的基础。In this paper, ZnO thin film with good morphology and crystallization quality was first grown on the sapphire substrate of fiber - surface by electron- beam evaporation （EBV）. The influence of optical properties in different temperature was measured using a novel temperature measurement system. The transmittance spectra shows sharp optical absorption edge, and the influence of 400 ℃ annealing on the optical properties of the ZnO thin films on the sapphire substrate of fiber - surface shows that there is few influence of transmission on the ultraviolet （400 -450 nm） band, not the same as visible-light（300- 380 nm ）band. This property reveals good temperature stabilization which supplies crucial evidences to further fabricate a fiber - optic temperature sensor based on semiconductor ZnO, using the influence of optical absorption spactra in different temperature.

关 键 词：ZNO薄膜 蓝宝石光纤 光学吸收边 光纤温度传感器 

分 类 号：TN253[电子电信—物理电子学]