朗谬尔探针诊断直流脉冲等离子体  

Langmuir Probe Diagnostics of DC Pulsed-Plasma

作　　者：蓝加平[1] 孙奉娄[1] 

机构地区：[1]中南民族大学电子信息工程学院,武汉430074

出　　处：《中南民族大学学报（自然科学版）》2008年第2期77-81,共5页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：武汉市重点科技攻关计划项目(200761023420)

摘　　要：采用朗谬尔双探针对工作频率为1 kHz、占空比为15%的直流脉冲等离子体在气体分别为空气、氨气和氩气,脉冲电压为600 V,压强为109 Pa条件下进行了诊断,得到了电子密度、电子温度在一个脉冲周期内随时间变化的情况.在采用空气放电时测量了辐射光强在一个脉冲周期内的变化情况.并对脉冲激励下的等离子体内参数的响应特殊现象进行了讨论.The time evolution of electron density and electron temperature during a pulse period has been measured by a Langmuir double probe in a plasma which generated by DC pulsed power. The frequency of the pulsed power is 1 kHz and it＇s duty cycle is 15 %. Air, ammonia and argon were used as discharge gas respectively. The pressure was fixed at 109 Pa and voltage of pulse power was fixed at 600 V. The radioluminescence during a discharge period has been measured when air was used as discharge gas. The special phenomena that the response of the intrinsic parameters of the plasma to the stimulation of the pulse power was discussed.

关 键 词：脉冲等离子体 朗谬尔探针 诊断 

分 类 号：O461[理学—电子物理学]