用于强流离子注入机的磁分析器电源设计  

DESIGN OF HIGHLY STABLE AND RELIABLE POWER SUPPLY FOR ANALYZER OF HIGH-CURRENT ION IMPLANTER

作　　者：孙雪平[1] 

机构地区：[1]电子部第四十八研究所,长沙410111

出　　处：《微细加工技术》1997年第4期19-24,共6页Microfabrication Technology

摘　　要：本文简要介绍了该电源的指标及电路．并详细论述了提高电源稳定度和可靠性的方法和措施，最后给出了测试结果和运行情况。The main technical specifications and the circuit principle blockdiagram of analyzer power supply are briefly described. Especially the methods and measures to enhance its stability and reliability are discussed. Finally,the results of test and operation are given.

关 键 词：强流离子注入机 磁分析器 电源 微电子技术 

分 类 号：TN305.3[电子电信—物理电子学] TN86