超磁致伸缩TbFe/FeAl多层膜的研究  

Giant magnetostrictive TbFe/FeAl multilayer thin films

作　　者：王伟[1] 宓一鸣[1] 钱士强[1] 周细应[1] 

机构地区：[1]上海工程技术大学材料工程学院,上海201620

出　　处：《材料热处理学报》2008年第4期56-59,共4页Transactions of Materials and Heat Treatment

基　　金：上海市教育委员会自然科学基金(05NZ03);上海市教委重点学科资助项目(XK0706)

摘　　要：采用直流磁控溅射法制备了TbFe/FeAl超磁致伸缩多层膜,研究了FeAl薄膜的复合对TbFe薄膜磁性能以及热处理温度对TbFe/FeAl磁致伸缩多层膜磁致伸缩系数的影响。结果表明,TbFe层与FeAl层之间的交换耦合作用以及热处理能明显提高薄膜的软磁性能和磁致伸缩性能;与TbFe单层膜相比,TbFe/FeAl多层膜水平方向的矫顽力从59.2kA.m-1降低到29.6kA.m-1;经最佳退火处理(350℃×60min),获得了较低的饱和磁场强度和矫顽力,分别为Hs=96kA.m-1和JHc=16kA.m-1;外加磁场400kA.m-1时,TbFe/FeAl磁致伸缩多层膜磁致伸缩系数可达574×10-6。The TbFe/FeAl muhilayer was prepared by dc magnetron sputtering, Structure, magnetic and magnetostrictive properties of TbFe/FeAl muhilayer were investigated, Effect of vacuum annealing on magnetostrictive properties was examined, The results reveal that soft magnetic and magnetostrictive properties of TbFe/FeAl muhilayer, compared to TbFe single layer, are obviously improved, In comparison to the intrinsic coercivity jHc of 59.2kA·m^-1 for TbFe single layer film, the intrinsic coercivity jHc for TbFe/FeAl muhilayer film rapidly drops to 29.6kA·m^-1 . After optimal annealing （350℃ ～ 60 min）, magnetic properties of Hs = 96kA·m^-1 and jHc = 16kA·m^-1 are obtained and magnetostrictive coefficient reachs to 574 × 10^-6 under 400kA·m^-1 external magnetic field for the TbFe/FeAl muhilayer film.

关 键 词：超磁致伸缩薄膜 磁控溅射 TbFe/FeAl 交换耦合 

分 类 号：TM271[一般工业技术—材料科学与工程]