PI参数自整定扫描探针显微镜控制器的设计  

Design of An SPM Controller with Self-adjusting PI Parameters

作　　者：侯锡立[1] 靳鹏云[1] 

机构地区：[1]中国科学院电工研究所微纳加工研究部

出　　处：《微细加工技术》2008年第2期1-4,共4页Microfabrication Technology

摘　　要：为了解决传统扫描探针显微镜(SPM)控制器中参数难以设定的难题,提出了一种SPM的PI参数自整定控制器的设计,并给出了控制器的硬件结构和软件设计。该控制器基于DSP,通过引入扫描式参数优化算法来实现。结果表明,该控制器能自动完成PI参数的测算,并给出最优的PI参数,提高了SPM扫描图像的质量。A novel design of self-adjusting PI controller was designed to solve the problem that the parameters of the traditional controller in scanning probe microscopy （SPM） are difficult to be adjusted. The hardware construction and software design were described. The P! controller based on DSP is realized by implementing the scanning parameter optimization algorithm. The experimental results show that the controller can automatically measure,calculate and optimize the PI parameters. The quality of SPM scanning images is improved.

关 键 词：PI参数自整定控制器 扫描探针显微镜 DSP 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]