Calculation,Simulation,and Testing for the Natural Frequency of a Micro Accelerometer  

微加速计固有频率的推导及验证(英文)

作　　者：熊继军[1] 范波[1] 郭虎岗[1] 高建飞[1] 

机构地区：[1]中北大学电子测试技术国家重点实验室,仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《Journal of Semiconductors》2008年第9期1715-1722,共8页半导体学报（英文版）

基　　金：the National Natural Science Foundation of China(No.50775209);NCET~~

摘　　要：A calculation and test method for the natural frequency of a high-g micro accelerometer with complex structures is presented. A universal formula for natural frequency, which can significantly simplify the structural design process, is deduced and confirmed by experiment. A simplified analytical model is established to describe the accelerometer＇s mechanical behavior and deduce the formula for the natural frequency. Finite element modeling is also conducted to evaluate the natural frequency of the micro-accelerometer and verify the formula. The results obtained from the analytical model and the finite element simulation show good agreement. Finally, a shock comparison method designed for acquiring the high frequency characteristics of the accelerometer is introduced to verify the formula by testing its actual natural frequency.为了解决压阻式加速度计的动态特性欠佳的共性,避免微加速度计在工作过程中因为共振导致结构损坏,在结构设计过程中选择合理固有频率是至关重要的.文中针对一种四边八梁结构的高g值压阻式加速度计,通过力学知识,简化结构并推导出其固有频率的理论计算公式,利用有限元仿真软件和测试高g值加速度计频率特性的方法,对该理论公式进行了仿真和实验验证,证明该理论公式的正确性和可用性.同时,文中介绍的简化结构的模型,能够用于复杂结构的应力、应变等的求解,验证的实验方法可以用于高g值加速度计固有频率的测试.而且,在加速度计结构的设计过程中,直接利用固有频率公式计算出结构的固有频率,从而简化加速度计的结构设计和优化过程,设计出最合理的固有频率结构.

关 键 词：natural frequency micro accelerometer Rayleigh-Ritz formula 

分 类 号：TH824.4[机械工程—仪器科学与技术]