基于MEMS技术的微型直接甲醇燃料电池的制作  

Preparation of MEMS-based micro direct methanol fuel cell

作　　者：索春光[1] 陈伟平[1] 刘晓为[1] 

机构地区：[1]哈尔滨工业大学MEMS中心,黑龙江哈尔滨150001

出　　处：《传感器与微系统》2008年第9期118-120,共3页Transducer and Microsystem Technologies

基　　金：国家"863"计划资助项目(2006AA04Z353)

摘　　要：为了进一步简化微型直接甲醇燃料电池(μDMFC)系统,便于电池批量生产,采用MEMS技术制作μDMFC。电池的制作包括传统的MEMS工艺,如,氧化、光刻、湿法刻蚀、硅—玻璃键合等方法,还包括一种新的催化电极制备方法,即采用硅片阳极氧化的方法。首先,制得多孔硅(PS)作为催化电极的基底,然后,采用化学镀法分别在PS上沉积出Pt阴极催化电极和Pt-Ru阳极催化电极。PS具有巨大的比表面积,使化学镀的催化剂层拥有不连续的三维结构,能显著增加催化剂的活性面积,同时,化学镀液中贵金属的利用率高达95%,可以有效地节约贵金属用量。研究中采用扫描电镜(SEM),能量色散X射线分析(EDX)对催化剂层的形貌和成分等物理性能进行了分析。In order to further simplify the micro direct methanol fuel cell（μDMFC） systems,MEMS technology is employed to batch fabricate μDMFC. Conventional MEMS processes, such as thermal oxidation, optical lithography, wet etching and anodic bonding are included. Furthermore, a novel method of fabricating electrocatalytic electrodes is introduced. First a porous silicon （PS）layer is formed by anodic etching in a HF- ethanol solution. Then the anodic and cathodal catalyst layer are formed by using electroless plating platinum or platinum and ruthenium（Pt-Ru） co-deposition over PS substrates. Catalyst being deposited on PS brings three- dimensional features, and the non-planar interfaces for the catalytic electrodes will increase the active surface area within a stated volume. Additionally, as high as 95 % the utilization ratio of noble metal in electrotess plating solution leads economizing platinum and ruthenium. SEM, EDX are employed to analysis the catalyst layer.

关 键 词：微型直接甲醇燃料电池 微电子机械系统 多孔硅 化学镀 

分 类 号：TM911.4[电气工程—电力电子与电力传动]