飞秒激光深孔加工技术研究  

Research of deep processing technology for femtosecond laser

作　　者：倪晓昌[1] 洪茹[1] 王清月[2] 柴路[2] 贾威[2] 

机构地区：[1]天津工程师范学院电子工程系,天津300222 [2]光电信息科学教育部重点实验室超快激光实验室天津大学精密仪器与光电子工程学院,天津300072

出　　处：《天津工程师范学院学报》2008年第3期5-8,20,共5页Journal of Tianji University of Technology and Education

基　　金：天津市科技发展计划科技攻关培育项目(043103911);天津工程师范学院科研发展基金项目(KJ-JH2007015:KYQD06001)

摘　　要：采用聚焦物镜与接收材料同步运动的方法,以二维平面图形式研究焦点前后脉冲的空间形态。通过改变小孔直径和小孔前后单脉冲能量,可以观察光束空间形态的变化。结果显示:脉冲能量大小只影响刻痕线宽大小;缩小掩模小孔直径时,焦点前后光束空间直径变化趋缓,甚至束腰位置也随之偏移。在选取合适参数的情况下,可成功刻划出边缘光滑的透射型金属光栅条纹。By adopting lens and simultaneous movement of material, the pulse space form before and after the focal point is studied in form of two-dimensional floor map.By changing the small hole diameter and the single pulse energy before and after the hole, space beam change can be observed.Experimental results show that pulse energy only effects on the laser trace width, and the diameter of laser pulse around focal point changes slowly when the pinhole diameter is modulated smaller, even the position of beam waist is changed.These phenomena can be explained by optical imaging theory.At last, it is successful that the technique has been used to draw a transmission metal grating lines with a selected parameter.

关 键 词：飞秒激光 激光烧蚀 针孔模板 透射光栅 

分 类 号：TG52[金属学及工艺—金属切削加工及机床]