六甲基二硅氮烷水解动力学研究  

Study on Hydrolysis Kinetics of Hexamethyldisilazane

作　　者：王留成[1] 武红旗[1] 李磊[1] 赵建宏[1] 宋成盈[1] 

机构地区：[1]郑州大学化工学院,河南郑州450001

出　　处：《郑州大学学报（工学版）》2008年第3期85-87,共3页Journal of Zhengzhou University（Engineering Science）

摘　　要：采用气相色谱仪分析的方法，考察了六甲基二硅氮烷在不同pH值、不同温度下的水解情况．结果表明，六甲基二硅氮烷的水解可按一级反应来描述，在pH=7-pH=13的范围内，随着pH值的增加，水解速率降低；在208～308K的范围内，温度对水解速率影响显著，温度升高，水解速率明显加快，pH=7时水解活化能为28．81kJ·mol^-1．Hydrolysis kinetics of hexamethyldisilazane（HMDS）was studied through gas chromatogram at various pH values and temperatures. The results show that the kinetic process of HMDS can be described by the first -order reaction, the hydrolysis rate reduced with the rising pH value in the range of pH =7 to pH = 13. In addition, the higher temperature was helpful to the hydrolytic process between 208 K and 308 K, the hydrolysis rate increased with the rise of temperature , the activation energy of HMDS hydrolysis was 28.81 kJ ·mol^ - 1 when pH = 7.

关 键 词：六甲基二硅氮烷 水解 动力学 

分 类 号：TQ013.2[化学工程]