微波PCVD法大尺寸透明自支撑金刚石膜的制备及红外透过率(英文)  

IR transmittance of large-sized free-standing transparent diamond films prepared by MWPCVD

作　　者：李博[1] 韩柏[2] 吕宪义[1] 李红东[1] 汪剑波[1] 金曾孙[1] 

机构地区：[1]吉林大学超硬材料国家重点实验室,吉林长春130012 [2]哈尔滨理工大学电气与电子工程学院,黑龙江哈尔滨150040

出　　处：《新型炭材料》2008年第3期245-249,共5页New Carbon Materials

基　　金：the National 863 Program of China(2002AA325090)~~

摘　　要：采用微波PCVD方法制备出直径50mm膜厚300μm的大尺寸透明自支撑金刚石膜。在甲烷体积分数2%的条件下制备的透明自支撑金刚石膜经过两面抛光后在500cm-1~4000cm-1红外波段范围内红外透过率达到70%,但是其生长速率只有1μm/h^2μm/h。在体积分数4%甲烷浓度下制备的自支撑透明金刚石膜,其生长速率达到7μm/h^8μm/h,经过两面抛光之后膜厚为260μm的金刚石膜的在500cm-1~4000cm-1红外波段范围内红外透过率达到60%左右,而且膜中心和边缘区的红外透过率基本相同。这些结果为大尺寸金刚石厚膜在红外窗口上的实际应用奠定了基础。Large-sized free-standing transparent diamond films of 50mm diameter and 300 μm thickness were prepared by microwave plasma chemical vapor deposition （MWPCVD）. The growth rate of the diamond film was only 1-2 μm/h when the diamond fihn was grown at a methane concentration of 2%, and the infrared （IR） transmittance reached 70% in the range of 500-4000cm^-1 after the fihn was polished on both sides. A high growth rate of 7-8μm/h was achieved for the film grown at a methane concentration of 4%. The thickness of the film was 260 μm after it was polished on both sides and its IR transmittance in the range of 500-4000 cm^-1 reached about 60%. Meanwhile, the IR transmittance was almost the same in the central and fringe regions. These results imply a promising application of large-sized thick diamond films in IR windows.

关 键 词：微波PCVD 透明自支撑金刚石膜 红外透过率 

分 类 号：O613.71[理学—无机化学]