尺蠖型压电驱动器的闭环控制  

Close-loop control of inchworm-type piezoelectric actuator

作　　者：赵宏伟[1] 杨志刚[1] 范尊强[1] 张志宇[1] 吴博达[1] 程光明[1] 

机构地区：[1]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《光学精密工程》2008年第9期1727-1731,共5页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2002AA423150);国家自然科学基金资助项目(No.50475010);高等学校博士点专项科研基金资助项目(No.20050183020)

摘　　要：针对尺蠖型压电驱动器的输出特性,提出了利用驱动电压与输出位移分段线性拟合曲线,逐步"搜索"驱动电压值,从而逼近目标位置的闭环控制方法。分析了控制方法的可行性,针对该方法,构建了闭环控制实验系统,对该方法进行了实验验证。实验结果表明,采用该方法可以实现对尺蠖型压电驱动器的闭环精确控制,系统闭环定位误差低于0.18μrad,定位精度比开环工作提高了14.4%。该方法具有控制精度较高、响应迅速、易于实现等优点。According to the output performance of inchworm-type piezoelectric actuator, a novel close-loop control method based on the subsection experiential equation between actuating voltage and corresponding stepping motion displacement was proposed. Via the method, the control system could search for the optimal actuating voltage step by step so as to approach to the target position. A experiment on the closed-loop system of the inchworm-type piezoelectric rotary actuator was carried on. The experimental results show that the novel method can control the actuator for precision positioning in closed-loop mode, and the positioning error of the actuator system in close-loop mode is 0. 18 μrad,which is improved by 14.4 % as compared to that of the open-loop working mode. The control method has the advantages of high accuracy, quick response and so on.

关 键 词：压电驱动器 尺蠖运动 精密定位 闭环控制 

分 类 号：TN384[电子电信—物理电子学]