MEMS电磁驱动微器件的失稳特性研究  

Instability Study of Electromagnetic Actuated Micro-devices in MEMS

作　　者：郭永献[1] 贾建援[1] 张秀艳[1] 张大兴[1] 

机构地区：[1]西安电子科技大学,西安710071

出　　处：《中国机械工程》2008年第16期1976-1979,共4页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(10476019)

摘　　要：在对电磁驱动微器件进行分类的基础上,详细分析了磁动势控制模型中不同类型电磁微器件的失稳特性。结果表明：竖直式和端点作用的旋转式电磁驱动微器件的失稳发生在系统气隙磁阻减小1/3的时候;旋面作用的旋转式电磁驱动微器件中,失稳角度（临界吸合角度）随磁力作用区域增大而增大,约介于系统最大旋转角度的33%-44%之间,励磁电流随磁力作用的悬臂区域的增大而先增大再减小。Based on the classification of the electromagnetic actuated micro- devices, the instabilities of different kinds of electromagnetic micro- devices were analyzed under MMF- controlled models. The results suggest that, while the magnetic resistance of the air gap is decreased by 1/3,the instable phenomena in the vertical type and the point--vortical type of electromagnetic micro --devices appear. While in the surface--vortical type of electromagnetic micro--devices, the pull--in angle θPl will increase with the increase of S, which is the effective area of the electromagnetic force acted on, and the value of θpl will be in the range of 33% and 44% of the max rotating angle θmax. The exciting current will increase at first and then decrease with the increase of S.

关 键 词：MEMS 电磁驱动微器件 失稳特性 磁动势控制 

分 类 号：TM153[电气工程—电工理论与新技术]