SnO_2∶Fe_2O_3混合薄膜的制备及其在丙酮蒸汽中的反射光谱  

Manufacture of SnO 2∶Fe 2O 3 compound film and study of their gas sensing reflective spectrum in acetone vapour

作　　者：郑顺镟[1] 庄中禄[1] 郭斯淦[1] 

机构地区：[1]中山大学物理系

出　　处：《激光技术》1997年第6期365-368,共4页Laser Technology

基　　金：广东省自然科学基金

摘　　要：以ＳｎＣｌ４·５Ｈ２Ｏ，ＦｅＣｌ３·６Ｈ２Ｏ及无水乙醇为主要原料，采用溶胶凝胶法制备了ＳｎＯ２∶Ｆｅ２Ｏ３混合薄膜，测量并研究了其在可见光区附近的丙酮气敏反射光谱。In this paper,we successfully utilize SnCl 4·5H 2O,FeCl 3·6H 2O and pure alcohol for manufacturing the SnO 2∶Fe 2O 3 compound film(the Mole rate of Sn and Fe is 1∶1) by using Sol Gel method.At the region of 500 1200nm,the reflective spectrum of the compound film was measured.The measurement results show taht the relative reflective index drops and the peak of reflective curve shifts with the increase of acetone vapour concentration.According to the research,the compound film can be used for a gas sensing detector.

关 键 词：溶胶-凝胶法 气敏反射光谱 半导体薄膜技术 

分 类 号：TN304.055[电子电信—物理电子学]