H13钢氮化前后表面磁控溅射CrAlN薄膜的摩擦磨损性能  

Tribological Behaviors of CrAlN Films Deposited by Magnetron Sputtering on Surface before and after Nitriding of H13 Steel

作　　者：尹小定[1] 王社斌[1,2,3] 余春燕[1] 田林海[4] 许并社[1,2,3] 

机构地区：[1]太原理工大学材料科学与工程学院,山西太原030024 [2]太原理工大学,山西太原030024 [3]教育部新材料界面与工程重点实验室,山西太原030024 [4]太原理工大学表面工程研究所,山西太原030024

出　　处：《机械工程材料》2008年第9期59-63,共5页Materials For Mechanical Engineering

基　　金：国家自然科学基金国际合作资助项目(50311140138);国家自然科学基金资助项目(20271037)

摘　　要：为了提高H13钢的表面耐磨性能，用直流磁控溅射法在氮化与未氮化的H13钢表面沉积CrAlN薄膜，并对处理前后的摩擦磨损性能进行了比较；用扫描电镜观察薄膜形貌，并测其厚度；测量了随炉硅片的薄膜显微硬度；用摩擦磨损试验机测试了在室温和600℃条件下薄膜的摩擦磨损性能。结果表明：薄膜平均厚度为4．8μm，硬度为23．7GPa；室温条件下材料的表面摩擦因数为0．60～0．65，600℃条件下摩擦因数为0．61～0．96；CrAlN／氮化H13钢和CrAlN／H13钢在室温摩擦时的耐磨性分别是H13钢的1．9倍和1．7倍，在600℃条件下耐磨性分别是H13钢的1．25倍和7倍。In order to improve the wear resistance of H13 steel, magnetron sputtering was applied to the deposition of CrAlN films on surface of H13 steel and nitrided H13 steel, respectively. The micrographs of the films were datected by SEM. Sliding friction and wear investigations were performed for three kinds of specimen surface using ball-on-disc type at room temperature and 600℃, respectively. It was shown that the average thickness of the deposited films was 4.8μm and the microhardness was 23.7 GPa, The friction coefficient was 0. 60-0. 65 at room temperature and 0. 61-0. 96 at 600℃. The wear resistance of CrAlN/nitrided H13 and CrAlN/H13 was 1.9 and 1.7 times of H13 at room temperature, respectively. And the wear resistance of CrAlN/nitriding H13 and CrAlN/ H13 was 1.25 and 7 times of H13 at 600 ℃, respectively.

关 键 词：H13钢 磁控溅射 CrAlN薄膜 摩擦磨损 

分 类 号：TG174.44[金属学及工艺—金属表面处理]