压电陶瓷驱动器性能的理论计算与ANSYS仿真  

Theoretical Caculation and ANSYS Simulation of Piezoceramics Actuation Capability

作　　者：李允[1] 沈星[1] 王宁[1] 

机构地区：[1]南京航空航天大学航空宇航学院智能材料与结构航空科技重点实验室,南京210016

出　　处：《安徽工业大学学报（自然科学版）》2008年第4期394-398,共5页Journal of Anhui University of Technology（Natural Science）

基　　金：江苏省自然科学基金(BK2006568)

摘　　要：通过理论推导与ANSYS仿真的方法对普通平面电极型压电驱动器及交叉指形电极型压电驱动器的自由应变进行分析,得到x和y方向的自由应变,并与N.Hagood等人的实验结果进行对比。结果表明:ANSYS仿真结果与理论计算结果非常接近,x方向自由应变误差仅为0.35%和-14%;采用应变片直接测量驱动元件局部表面的应变有较高的误差,x方向应变误差分别为147%和73.3%;交叉指形电极的压电驱动元件表现出较高的正交各向异性,横向效应系数是普通平面电极压电驱动器的2.2倍。Free strains of piezoelectric actuator with conventional plane surface electrode pattern and interdigitated electrode pattern in x and y directions were studied through piezoceramic constitutive relations and ANSYS. A contrastive analysis was carried out between these results and experimental results achieved by N.Hagood. The results show that the ANSYS method get more accurate free strain which has a error of 0.35% and -14% respectively, however direct measurement on the wafer surface has big error which is 147% and 73.3% respectively. More anisotropic planar actuation can be Obtained become of utilizing interdigitated electrode pattern,transverse effect coefficient is two times than that of conventional piezoelectric actuator.

关 键 词：压电驱动器 自由应变 正交各向异性 横向效应系数 

分 类 号：TB381[一般工业技术—材料科学与工程]