高亮度LED中ODR反光镜反射率温度特性研究  

Temperature Characteristic of Reflectivity of Omni-directional Reflector in the High Brightness Light-emitting Diodes

作　　者：宋欣原[1] 邹德恕[1] 张剑铭[1] 刘思南[1] 沈光地[1] 

机构地区：[1]北京工业大学,北京市光电子技术实验室,北京100022

出　　处：《固体电子学研究与进展》2008年第3期396-399,共4页Research & Progress of SSE

基　　金：国家973计划(20000683-02);北京市教委项目(2002kj018);北工大博士启动基金(kz0204200387);国家自然科学基金(60407009);北京自然科学基金(4032007)

摘　　要：对Al/SiO2、Al/ITO、Au/SiO2、Au/ITO构成的ODR(Omni-directional reflector)结构,对应400～800 nm的不同波长,在不同温度下,对于反光镜的反射率的影响,进行了研究。提出了在460 nm的蓝光波段,Al/SiO2合金温度在500～700 K时,反射率会达到最小值,温度在700 K以上时,又到常温值,且略微增加;Al/ITO反射率是随着温度变化单调下降的,因此要在Al反光镜的表面采用Ti/Al/Ti/Au的结构,改善反光镜的特性;620 nm的红光波段,Au/SiO2和Au/ITO的合金温度在700 K时,具有最理想的反射率,且Au/SiO2结构的反射效果要优于Au/ITO结构。用实验的方式进行了验证,分析了可能造成反射率变化的原因。This paper researches the influence of different anneal temperature to the refleetivity of the Al/SiO2, Al/ITO, Au/SiO2 Au/ITO ODR corresponding to the wavelength of 400nm-800 nm. It is proposed that, in the wavelength of 460 nm, the reflectivity is clown to minimum when the anneal temperature of Al/SiO2reflector is 500-700 K, and when temperature above 700℃, it is back to normal and increase a little; the one of Al/ITO decreases monotonic with the increasing temperature, and Ti/A/Ti/Au structure is applied to improve the characteristic of the reflector. Moreover, it is also noted that, in the wavelength of 620nm, reflectivity of Au/SiO2 and Au/ITO both achieve the maximum with the anneal temperature of 700K, and the performance of Au/SiO20DR is superior to that of Au/ITO. We validates the conclusion with the experiment and analysis the cause of the variation of the reflectivity.

关 键 词：退火 反射率 全方位反光镜结构 

分 类 号：TN312.8[电子电信—物理电子学]