Fe离子注入α-Al_2O_3单晶注入态和还原气氛退火态的微观结构  

Microstructure of α-Al_2O_3 implanted with iron at room temperature and annealed in a reducing atmosphere

作　　者：王岩[1] 齐民[1] 李国卿[1] 李斗星[2] 

机构地区：[1]大连理工大学材料科学与工程学院,辽宁大连116024 [2]中国科学院金属研究所,辽宁沈阳110016

出　　处：《电子显微学报》2008年第4期287-292,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.50571100)~~

摘　　要：本文利用透射电子显微术,研究了注入Fe离子的-αAl2O3单晶(sapphire)在还原气氛退火过程中微观结构的变化。研究表明,在还原气氛退火过程中,先前注入的Fe离子析出为-αFe纳米颗粒。一些-αFe颗粒周围存在空洞,而一些大的-αFe颗粒呈现出多面体的轮廓。大部分-αFe析出相与-αAl2O3基体具有如下取向关系:(111)-αFe∥(0001)sapphire,[110]-αFe∥[1120]sapphire。只有很少的-αFe析出相偏离该取向关系,而最大的偏离角小于3°。近重位倒易点阵分析表明:在-αFe和-αAl2O3体系中,该取向关系是最有利的;而在该体系中发现的另一取向关系(110)α-Fe∥(0001)sapphire及<111>-αFe∥<5 14 0>sapphire是次有利取向关系。Fe ions were implanted into α-Al2O3. single crystals （sapphire） at energy, of 50 keV to a dose of 1×10^17 ions/cm^ 2 at room temperature. The mierostructure in the implanted region was studied by transmission electron microscopy. With annealing in a reducing atmosphere, the implanted Fe ions precipitate as the α-Fe particles. Some α-Fe particles are attached to voids. The large iron particles greater than 20 nm and some voids clearly have faceted outlines. Most of the α-Fe particles have the orientation relationship （OR） of （ 111 ）α-Fe// （0001）sapphire. and[ 1 1^-0]α-Fe//[ 11 2^-0]sapphire with sapphire. Only a small quantity of the α-Fe particles have the deviation from this OR and the maximum deviation is less than 3°. This OR is predicted precisely by the method of coincidence of reciprocal lattice points. Another OR of （110）.α-Fe//（0001）sapphire and 〈 111 〉 α-Fe// 〈 5 1^- 4^-0 〉 sapphire reported before is confirmed to be secondary preferred orientation in the α-Fe/ sapphire system.

关 键 词：α-Al2O3单晶 离子注入 透射电子显微术 近重位倒易点阵 

分 类 号：O76[理学—晶体学] TG174.444[金属学及工艺—金属表面处理]