Ag、Al掺杂对ZnO薄膜结构和光学性能的影响  

Effect of Ag and Al doping on structure and optical properties of ZnO thin films

作　　者：秦秀娟[1] 王佳宁[2] 卜立敏[2] 孙丽[2] 孟惠民[1] 刘日平[3] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083 [2]燕山大学环境与化学工程学院,河北秦皇岛066004 [3]燕山大学亚稳材料制备技术与科学国家重点实验室,河北秦皇岛066004

出　　处：《兵器材料科学与工程》2008年第5期10-13,共4页Ordnance Material Science and Engineering

基　　金：国家自然科学基金资助(No.50325103);河北省教委基金资助(No.2005309)

摘　　要：采用两种溶胶-凝胶工艺在普通玻璃基片上制备Ag:ZnO和Al:ZnO薄膜,通过XRD、UV-Vis吸收谱等分析方法,研究掺杂Ag和Al对半导体ZnO薄膜的组织结构和光学性能的影响。分析表明:掺杂Ag和Al对ZnO薄膜结构的影响因成胶工艺不同而有差异。但掺杂离子对ZnO薄膜光学性能的影响结论是一致的。即Al3+离子掺杂显著减小了晶粒尺寸,薄膜禁带宽度增大,紫外—可见光吸收边出现蓝移。Ag+离子掺杂增大了晶粒尺寸,薄膜禁带宽度减小,紫外—可见光吸收边出现红移。Ag and Al doped ZnO thin films were prepared on glass substrates by two kinds of sol-gel methods, which were characterized by X-ray diffraction, ultra-violet spectrometer. It is found that there are differences between two kinds of sol-gel methods on structural properties, but conclusions on optical properties agree with each other. That is Al-doped ZnO thin films having obvious smaller grain size, band-gap broadening and absorption edge blue shift. However, there are opposite conclusions on Ag doped ZnO thin films.

关 键 词：掺杂ZnO薄膜 溶胶-凝胶法 结构特性 光学特性 

分 类 号：TN304.21[电子电信—物理电子学]