MEMS微电磁驱动器的分段磁路模型及实验研究  

Modeling and Experimental Study of an MEMS Electromagnetic Actuator

作　　者：鲁李乐[1] 赵小林[1] 戴旭涵[1] 刘亮[1] 丁桂甫[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家重点实验室,薄膜与微细技术教育部重点实验室,上海200030

出　　处：《电子器件》2008年第5期1537-1541,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目资助(50405013);国家863计划项目资助(2006AA04Z360);上海市科委重点实验室基金项目资助(05dz22309);微米/纳米加工技术国家级重点实验室基金资助(9140C790301060C79)

摘　　要：介绍了一种MEMS电磁微驱动器。基于分段磁路的网络方程法,针对微电磁驱动器所采用的平面线圈的结构特点,建立了平面线圈微驱动器的非线性磁路模型。实验结果表明,考虑线圈绕组半径不同而产生的磁动势分布效应可以为平面线圈型微驱动器建立可靠的模型。采用硅微细加工技术和微电铸技术成功地制作出了这种微驱动器,并对器件的性能进行了测试,测试结果表明,该模型能很好地计算驱动器的电磁力。A planar type MEMS electromagnetic actuator is described. Based on the network solving method of magnetic circuits, considering the structural characteristic of planar coil, a nonlinear magnetic circuit model has been built. The experimental results indicate that it is much more reliable to build a model con- sidering the distributing effects of the magnetomotive force caused by different radius among each turn of the coil. The Silicon Micromachining and micro-electroplating technology is used to fabricate this actuator, and the test results match well with the model.

关 键 词：微机电系统(MEMS) 电磁驱动 分布磁动势 

分 类 号：TM384[电气工程—电机] TN605[电子电信—电路与系统]