[FePt/Ag]_n多层颗粒膜的磁学性能及微观结构  

Magnetic properties and microstructure of [FePt/Ag]_n multilayer granular thin films

作　　者：程晓敏[1] 杨晓非[1] 董凯峰[1] 李佐宜[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《华中科技大学学报（自然科学版）》2008年第9期37-40,共4页Journal of Huazhong University of Science and Technology(Natural Science Edition)

基　　金：国家自然科学基金资助项目(60571010);湖北省铁电压电材料与器件重点实验室(湖北大学)开放基金资助项目

摘　　要：采用磁控溅射方法制备了一系列[FePt/Ag]n多层颗粒膜,经过退火处理,用原子力磁力显微镜和振动样品磁强计研究了其微观结构及磁学性能.研究结果表明:在FePt薄膜中加入适当含量的Ag有利于FePt在较低退火温度下发生有序化相变,但在FePt有序化相变完成之后,颗粒膜中的Ag原子的扩散阻碍薄膜矫顽力的进一步提高;[FePt/Ag]n颗粒膜的晶粒及其岛状磁畴的大小随着退火温度的升高而增大;溅射成膜过程中适当的基片加温有利于降低[FePt/Ag]n颗粒膜的后续退火处理温度.[FePt/Ag]n multilayer granular thin films were prepared by magnetron sputtering and subsequently annealed in vacuum. The magnetic properties and microstructure of these annealed films were investigated using atomic and magnetic force microscope and vibrating sample magnetometer, respectively. Proper Ag addition was found helpful for FePt phase transition at lower annealing temperature while harmful for the further improvement of thin film coercivity after the phase transition was completed. The grain size and island-like magnetic domain dimension of [FePt/Ag]n granular thin films increase with the annealing temperature increases. High substrate temperature sputtering is useful for lowering the subsequent annealing temperature.

关 键 词：[FePt/Ag]n颗粒膜 磁控溅射 矫顽力 微观结构 退火 

分 类 号：TM271.3[一般工业技术—材料科学与工程]