高压互连线的Galerkin边界元法  

Galerkin BEM for High Voltage Interconnections

作　　者：蒋华平[1] 方健[1] 乔明[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《微电子学》2008年第5期663-665,687,共4页Microelectronics

基　　金：国家自然科学基金资助项目<单片功率系统集成(PSOC)基础理论与技术研究>(60436030)

摘　　要：针对有限元法难以处理求解区域具有奇异边界的边值问题和计算量相对较大的不足,采用常单元离散形式的Galerkin边界元法处理简化的二维高压互连线问题。在计算系数矩阵元的奇异二重积分时,采用解析的方法,将该算法的误差限制在边界及边界函数的离散上,提高了精度。用Matlab编写了程序,计算结果表明,所提出的方法是有效可行的。With relative deficiency of finite element method （FEM） in dealing with non-regular boundary problems taken into consideration, an approach to dealing with the problem of interconnects of two-dimensional high-voltage device by boundary element method （BEM）was presented, Error was restricted on discrete boundary value function by analytically calculating the double integrals of elements of coefficient matrices. A comparison was made between results based on Matlab and those from Medici simulation, to verify the efficiency of the proposed method.

关 键 词：高压互连线 Galerkin边界元法 解析积分 

分 类 号：TN386.1[电子电信—物理电子学]