掺铝氧化锌(ZAO)透明导电薄膜的研究进展  

Development and Progress of Transparent Conducting ZAO Thin Films

作　　者：王银玲[1,2] 徐雪青[1] 徐刚[1] 何新华[2] 

机构地区：[1]中科院广州能源研究所中国科学院可再生能源与天然气水合物重点实验室,广州510640 [2]华南理工大学材料学院,广州510640

出　　处：《材料导报（纳米与新材料专辑）》2008年第2期297-300,共4页

基　　金：2006年粤港关键领域重点突破项目(200649851105)

摘　　要：综述了掺铝氧化锌(ZAO)透明导电薄膜的国内外研究进展,光学性能与电学特性,各种制备方法及应用前景。重点介绍了溶胶-凝胶法制备ZAO薄膜的热处理条件、溶胶浓度、陈化时间、加水量以及稳定剂种类和用量等方面对薄膜结构和性能的影响,并提出了ZAO薄膜的研究关键以及今后的发展方向。Optical and electrical properties of ZAO thin films and the preparation technology and application prospect are reviewed. The influences of heat treatment conditions of the preparation of ZAO thin films by sol-gel method such as the concentration of the sol, the aging time, the water content and kinds of stabilizer on the structure and properties of thin films are discussed. The key research problems and the future research direction of the transparent conducting thin film are presented.

关 键 词：ZAO薄膜 电学光学性能 溶胶-凝胶 应用 

分 类 号：O484.41[理学—固体物理] TN304.055[理学—物理]