压阻式微加速度计灵敏度的温度特性研究  

Study on the Sensitivity of the Piezoresistive Accelerometer as a Function of Temperature

作　　者：王楷群[1] 张文栋[1] 毛海央[2] 

机构地区：[1]中北大学电子测试技术国家重点实验室,仪器科学与动态测试教育部重点实验室,太原030051 [2]北京大学微电子研究所,北京100871

出　　处：《传感技术学报》2008年第9期1536-1540,共5页Chinese Journal of Sensors and Actuators

基　　金：国家自然基金资助(50775209/E052502)

摘　　要：以压阻式微加速度计为研究对象,定量研究了环境温度对其灵敏度的影响。理论研究结果表明,压阻式微加速度计灵敏度的相对误差随着温度偏差绝对值的增大而增大;其中灵敏度误差在温度偏差为+20℃时达到-4.943%,在温度偏差为-20℃时达到4.982%。设计了压阻式微加速度计压敏电阻的温度特性测试系统,测试结果表明,在温度偏差为+20℃时,灵敏度误差为-4.303%,温度偏差为-20℃时,实验值为4.251%。理论计算值与实验测试值相吻合。The influence of temperature on the sensitivity of the piezoresistive micro-accelerometer is quantitatively researched. As the theoretical research shows that the relative error of the sensitivity of the piezoresistive micro-accelerometer increases with the increase of temperature deviations, which is --4. 943% at the temperature of 20℃ ,and 4. 982% at --20℃. Temperature characteristic testing system of the piezoresistive micro-accelerometer is designed, and the testing results show that the relative error of the sensitivity is -4. 303% at the temperature of 20℃, and 4. 251% at -20℃. The theoretical results accord well with the testing results.

关 键 词：相对误差 温度偏差 迁移率 灵敏度 压阻式微加速度计 

分 类 号：TN302[电子电信—物理电子学]