MWCNT-WO_3薄膜双声路SAW NO_2气体传感器  

Dual Track Surface Acoustic Wave NO_2 Gas Sensor with MWCNT-WO_3 Films

作　　者：文常保[1] 朱长纯[2] 巨永锋[1] 邱彦章[1] 许宏科[1] 刘君华[2] 

机构地区：[1]长安大学电子与控制工程学院,西安710064 [2]西安交通大学电子与信息工程学院,西安710049

出　　处：《传感技术学报》2008年第10期1678-1681,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金资助项目(60176020;60476037);教育部博士点基金资助项目(20020698014)

摘　　要：以金属钨粉,H2O2,CH3OH和多壁碳纳米管(MWCNT)为原料,在双声路声表面波(SAW)器件的测量声路上制作了MWCNT-WO3薄膜,提出并实现了一种MWCNT-WO3薄膜双声路SAW NO2气体传感器。由于MWCNT和WO3对NO2气体都有敏感作用,而且碳纳米管的毛细作用、以及MWCNT的加入都增加了气体的接触面积,提高了NO2气体的吸附和敏感作用。同时,SAW器件的双声路结构消除了由于外界测量条件改变引起的测量误差,也进一步提高了传感器的可靠性和准确性。实验结果表明,该传感器对各种浓度的NO2气体具有好的响应特性,在31.2×10-9到20×10-6范围内,传感器的响应灵敏度为9.8kHz/1×10-6,比单一MWCNT或WO3薄膜对NO2气体具有更好的灵敏度和线性特性。A novel scheme of dual track surface acoustic wave （SAW） NO2 gas sensor with MWCNT-WO3 films is proposed. Utilizing Tungsten powders, H2O2 ,CH3 OH and MWCNT as raw materials, MWCNT- WO3 film is fabricated in measure acoustic track of dual track surface acoustic wave device. MWCNT and WO3 are all sensitive to NO2 gas, and the contact area is spread due to the capillary action and doped of MWCNT, thus, the absorption of NO2 gas and sensitivity of sensor are improved. The dual track receiving structure is incorporated into the sensor, thus the environment disturbance quantities for measurement signal are eliminated, and the reliability and veracity are further improved. Experiments results confirm that the dual track SAW NO2 gas sensor with MWCNT-WO3 films is endowed with excellent response performance for different concentration NO2 gas, and the sensitivity reaches to 9. 8 kHz in measurement range from 31.2 × 10^-9 to 20 × 10^-6. Furthermore, the sensor has better sensitivity and linearity properties compared with only MWCNT or WO3 films.

关 键 词：声表面波器件 MWCNT WO3 NO2气体 传感器 

分 类 号：TN65[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]