Cr/C复合镀层的制备及其力学性能研究  

Preparation and Mechanical Properties of Cr/C Composite Coatings

作　　者：苏阳[1] 蒋百灵[1] 白力静[1] 龙艳妮[1] 王伟[1] 

机构地区：[1]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《西安理工大学学报》2008年第3期268-272,共5页Journal of Xi'an University of Technology

基　　金：国家"863"科技攻关资助项目(2005AA33H010);西安理工大学创新基金资助项目(101-210603)

摘　　要：采用磁控溅射技术,以溅射石墨靶为C元素主要来源的方法制备了不同碳含量的Cr/C复合镀层。研究了碳含量对镀层相结构及元素存在状态的影响,并考察了碳含量变化后镀层硬度,韧性,结合强度等力学参量的变化。结果表明:该方法制备的Cr/C镀层中碳化物相主要是Cr3C2。随着碳含量的增加,镀层由晶态向非晶态结构过渡;镀层中的碳化物相也相应减少;镀层的硬度则随之而上升,韧性则下降。碳含量为75.08%的镀层结合强度最差。碳含量为42.37%,51.93%表现出较好的综合力学性能。Cr/C composite coatings are deposited by Magnetron sputtering, and sputtering graphite targets are the main source of carbon element. The effects of carbon contents upon coating phase structure are studied, and the hardness, toughness, adhesion of coatings with various carbon contents are evaluated. The results indicate that ：chromium carbide in Cr/C coatings prepared by sputtering graphite targets are mainly Cr3C2. With an increase in carbon contents, coating is transformed from crystalized structure to amorphous structrue, with content of chromium carbide reduced, hardness increased, and toughness decreased, and that coating with 75.08 % carbon content has the poor adhesion, coating with 42.37% ,51. 93% carbon contents shows the best mechanical properties.

关 键 词：磁控溅射 Cr/C镀层 X射线衍射 X射线光电子能谱 力学性能 

分 类 号：O484.5[理学—固体物理] TH117.3[理学—物理]