氧化铝薄膜湿度传感器湿度源装置设计  

Design of humidity fountain equipment for alumina film humidity sensor

作　　者：徐凌[1] 任先武[1] 周明军[1] 栾剑[1] 王朔[2] 

机构地区：[1]中国电子科技集团公司第四十九研究所,黑龙江哈尔滨150001 [2]浙江大学控制系,浙江杭州310058

出　　处：《传感器与微系统》2008年第10期104-106,共3页Transducer and Microsystem Technologies

摘　　要：设计了测量氧化铝湿度传感器的湿度源装置,该装置由5个固体干燥剂湿度源单元组成。实验了露点9.3^-33.5;9.3^-65.2℃;-14.5^-65.2℃;-65.2^-14.5℃转换时的平衡时间特性,实验验证了湿度源单元的准确性。结果表明:露点-65.2^-14.5℃转换时的平衡时间小于2 min,固体干燥剂湿度源装置可满足氧化铝湿度传感器实验测量需要。The equipment of humidity fountain of measuring alumina humidity sensor is designed, which is composed of five humidity fountain cells containing solid desiccant. Balance time characteristic is investigated from 9.3--33.5℃ DP;9.3--65.2 ℃ DP; -14.5--65.2℃ DP; -65.2 --14.5℃ DP, and the veracity of humidity cell is validated. The results show that it is less than 2 min from -65.2--14.5℃ DP. The humidity fountain equipment of solid desiccant can meet the experimental meeds of alumina humidity sensor.

关 键 词：湿度传感器 露点 干燥剂 湿度源 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]