BCB/InP基宽带低损耗共面波导微波传输线  

BCB/InP Based Wideband and Low loss Coplanar Waveguide Microwave Transmission Line

作　　者：侯海燕[1] 熊兵[1] 徐建明[1] 周奇伟[1] 孙长征[1] 罗毅[1] 

机构地区：[1]清华大学电子工程系,清华信息科学与技术国家实验室(筹)/集成光电子学国家重点实验室,北京100084

出　　处：《半导体光电》2008年第5期733-736,740,共5页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(60536020,60723002);国家“973”计划项目(2006CB302800,2006CB921106);国家“863”计划项目(2006AA03A105);北京市科委重大计划项目(D0404003040321);清华大学电子系传信基金资助项目

摘　　要：面向高速行波电吸收（EA）调制器的需要，设计并制作了基于苯并环丁烯（BCB）聚合物／InP衬底的宽带（0～40GHz）、低损耗微波共面波导传输线。对共面波导结构开展仿真设计，分别对BCB材料厚度、InP衬底导电率和信号电极宽度等关键参数进行了优化。结果表明，当设计的BCB膜厚为4μm、InP衬底导电率小于0．002（Ω·cm）^-1和信号线宽度为84μm时，微波传输性能可达最优。在此基础上，采用电阻率为10^8μΩ·cm的半绝缘（SI）InP衬底、涂覆4μmBCB薄膜，制作出0～40GHz范围内微波损耗小于0．5dB／mm的共面波导传输线。A wideband（0-40 GHz）, low loss coplanar wavegmde microwave transmission line based on BCB polymer/InP substrate was designed and fabricated for high speed travelingwave electro-absorption （EA） modulators. Based on the simulation of the structure of coplanar waveguides, the key structure factors including the thickness of BCB films, the conductivity of InP substrate, and the signal electrode width were optimized. The simulation results show that the optimum microwave transmission can he obtained at BCB film thickness of 4 μm, InP conductivity less than 0. 002 （Ωcm）-1 and signal electrode width of 84 μm. Therefore, by using a semi-insulated InP substrate with resistivity of 10^8 Ω cm and a 4 μm thick spin-coated BCB thin film, a coplanar waveguide transmission line was fabricated with microwave loss less than 0.5 dB/mm in 0-40 GHz range.

关 键 词：低损耗InP基微波波导 共面波导 苯并环丁烯 半绝缘InP衬底 

分 类 号：TN929.11[电子电信—通信与信息系统]