二维高精度磁悬浮定位平台的研究  

Two-Dimensional High Precision Positioning Maglev Stage

作　　者：景敏卿[1] 刘恒[1] 梁金星[1] 虞烈[1] 

机构地区：[1]西安交通大学机械工程学院,西安710049

出　　处：《西安交通大学学报》2008年第11期1377-1381,共5页Journal of Xi'an Jiaotong University

基　　金：国家重点基础研究发展规划资助项目(2003CB716206)

摘　　要：为了解决传统精密机械支承平台由于传动副的间隙、摩擦以及传动杆件弹性变形等引起的运动与定位误差问题,研制了具有"近零摩擦"运动副的高精度磁悬浮二维定位平台样机.该定位平台采用两层结构,最大行程500 mm,每层平台均采用结构相同的6对电磁铁,并以四角磁悬浮支承和侧向平动控制的方式置于导轨之上来实现平台的磁悬浮运动.通过设计磁悬浮平台的受力结构,获得了对平台垂直、水平方向的解耦控制方案.根据电磁轴承系统的数学模型分析,设计并开发了二维电磁悬浮平台和控制系统,使用dSPACE数字控制平台和模拟控制手段,实现了电磁悬浮平台在比例、积分和微分(PID)控制下的5自由度静态稳定悬浮.试验结果表明,悬浮精度达到了10μm,因而有希望成为新一代半导体制造中的高精度定位平台.To eliminate the movement and position error caused by gap, friction of motion pair and elastic deformation of driving-part for the traditional mechanical stage, a prototype for two- dimensional movement maglev stage with near-zero-friction motion pair is developed, where the double stage structure with 500 mm movement distant is adopted, each stage is constracted with six pairs of the same electromagnets to achieve magnetic levitation motion, and the stage in the way of foursquare magnetic levitation and translational control in the side direction are located above the lead rail. Designing the magnetic force applied to the one-dimension stage, the decoupiing control scheme of the maglev stage for vertical and horizontal directions is established. According to the mathematic model of active magnetic bearing system, the two-dimensional maglev stage and the control system are designed and developed. With the method of dSPACE digital control prototype and analog control, the maglev stage is successfully levitated in 5 degrees of freedom under PID control, and the start-levitation characteristic and shock response of the maglev stage are tested. The suspension accuracy of two-dimensional maglev stage gets to 10 μm, which predicts the further applications for the next-generation of semiconductor manufacturing.

关 键 词：磁悬浮定位平台 PID控制 磁悬浮 

分 类 号：TH133.3[机械工程—机械制造及自动化]