上海市半导体行业挥发性有机物(VOCs)排放特征研究  

A Study on Emission Pattern of Volatile Organic Compounds (VOCs) from Semiconductor Manufacturing Industry

作　　者：徐捷[1] 魏海萍[1] 修光利[2] 伏晴艳 吴迓名 李炎 王歆文 

机构地区：[1]上海市环境监测中心 [2]华东理工大学 [3]不详

出　　处：《上海环境科学》2007年第5期198-202,206,共6页Shanghai Environmental Sciences

摘　　要：采用工艺调查与现场监测相结合的方法，研究了半导体行业废气排放中挥发性有机物（VOCs）的种类和排放水平。结果表明，共检测出26种有机物，其中以异丙醇排放量最大。采用排放系数法估算了2004年上海市半导体行业VOCs的排放量和2010年的预期排放量，并提出了加强和完善排放标准及清洁生产等控制措施的建议。Combining process investigation with field monitoring, constituents and concentration levels of volatile organic compounds （VOCs） released from typical semiconductor manufacturing factories in Shanghai were studied. The results indicated that of 26 ones in the VOCs observed, the emission loading of isopropyl alcohol （IPA） was the highest. The emission of VOCs from semiconductor manufacturers in the year 2004 and its projection in the year 2010 were estimated by emission factor method. Some suggestions to complete the emission standards and to promote cleaner production were provided and discussed.

关 键 词：挥发性有机物 半导体制造 排放速率 

分 类 号：X51[环境科学与工程—环境工程] F407.63[经济管理—产业经济]