硅压阻式压力传感器的现场可编程自动补偿技术  

Local programmable automatic compensation technology of silicon piezoresistive pressure sensor

作　　者：袁智荣[1] 郭和平 

机构地区：[1]西北工业大学三六五所,陕西西安710072 [2]西安中星测控有限公司,陕西西安710065

出　　处：《传感器与微系统》2008年第11期72-73,77,共3页Transducer and Microsystem Technologies

摘　　要：为了提高硅压阻式压力传感器温度性能指标，并实现快速补偿，通过以ADμC816微处理器为核心设计了智能压力传感器，提出了传感器在宽温区下测量误差的自动补偿办法，通过对IC sensor系列压力传感器的应用，使其温度性能提高了1-2个数量级。In order to improve the temperature performance of the silicon piezoresistive pressure sensor and achieve rapid compensation, a smart pressure sensor based on ADμC816 microprocessor is designed, and a automatic compensation mean is introduced for the measurement error under wide temperature range. The result presents that the temperature performance of the IC sensor series of pressure sensor is improved 1 - 2 order of magnitude by this way.

关 键 词：硅压阻 压力传感器 下载 自动补偿 

分 类 号：TP202[自动化与计算机技术—检测技术与自动化装置]